Plasma polymerization. VII. An esca investigation of the RF plasma polymerization of perfluorobenzene and perfluorobenzene/hydrogen mixtures
- 1 July 1982
- journal article
- Published by Wiley in Journal of Polymer Science: Polymer Chemistry Edition
- Vol. 20 (7), 1717-1728
- https://doi.org/10.1002/pol.1982.170200706
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Plasma polymerization. VIII. A comparative study of the plasma polymers produced from inductively coupled plasmas excited in the fluorobenzenesJournal of Polymer Science: Polymer Chemistry Edition, 1982
- Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene.Journal of Polymer Science: Polymer Chemistry Edition, 1981
- Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygenJournal of Applied Physics, 1980
- Plasma polymerization. III. An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasmas in perfluorocyclohexa‐1,3‐ and 1,4‐dienes, and in perfluorocyclohexeneJournal of Polymer Science: Polymer Chemistry Edition, 1980
- Plasma polymerization. II. An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasma in perfluorobenzene and perfluorocyclohexaneJournal of Polymer Science: Polymer Chemistry Edition, 1980
- Plasma polymerization: An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasmas in isomeric difluoroethylenesJournal of Polymer Science: Polymer Chemistry Edition, 1979
- ESCA applied to polymers. XIX. Investigation of polymer films produced by inductively coupled RF plasmas excited in vinylidene fluorideJournal of Polymer Science: Polymer Chemistry Edition, 1978
- Critical evaluation of conditions of plasma polymerizationJournal of Polymer Science: Polymer Chemistry Edition, 1978
- A method to reduce the hydrocarbon contamination of samples in X-ray photoelectron spectroscopyJournal of Electron Spectroscopy and Related Phenomena, 1977
- Applications of ESCA to polymer chemistry. III. Structures and bonding in homopolymers of ethylene and the fluoroethylenes and determination of the compositions of fluoro copolymersJournal of Polymer Science: Polymer Chemistry Edition, 1973