Monolithic integrated direction-sensitive flow sensor

Abstract

A manolithic integrated direction-sensitive flow sensor for measuring the velocity of gas or liquid flow is described. Its operation is based on the transfer of heat from a heated chip to a flowing fluid. Temperature differences on the chip are a measure for the flow velocity and flow direction in a plane parallel with the chip's surface. The sensor can be embedded in a wall, for example, in a wall of a tube conducting a fluid flow, and can be shielded from a direct contact with the fluid. Measurements are stated for velocities in a range below 3 m/s for air at room temperature.