Large area high density quantized magnetic disks fabricated using nanoimprint lithography
- 1 November 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (6), 3825-3829
- https://doi.org/10.1116/1.590417
Abstract
A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.2 and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.2 The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopKeywords
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