Growth behavior of YBa2Cu3O7−δ and NdBa2Cu3O7−δ thin films observed by electron diffraction

Abstract
Growth behavior of thin films of YBa2Cu3O7−δ and NdBa2Cu3O7−δ has been observed in reflection high‐energy electron diffraction (RHEED) during coevaporation of constituent metal atoms with a NO2 supersonic molecular beam. The intensity oscillations of RHEED specular beam have been observed during deposition. The nucleation behavior of NdBa2Cu3O7−δ is found to be different from that of YBa2Cu3O7−δ in RHEED observation.