Growth behavior of YBa2Cu3O7−δ and NdBa2Cu3O7−δ thin films observed by electron diffraction
- 29 July 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (5), 600-602
- https://doi.org/10.1063/1.105398
Abstract
Growth behavior of thin films of YBa2Cu3O7−δ and NdBa2Cu3O7−δ has been observed in reflection high‐energy electron diffraction (RHEED) during coevaporation of constituent metal atoms with a NO2 supersonic molecular beam. The intensity oscillations of RHEED specular beam have been observed during deposition. The nucleation behavior of NdBa2Cu3O7−δ is found to be different from that of YBa2Cu3O7−δ in RHEED observation.Keywords
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