Lubrication with Sputtered MoS2Films

Abstract

Sputtered MoS₂films (2000–6500 Å) were deposited on highly polished metal surfaces. These films have a low coefficient of friction (0.03–0.04) at speeds of 40–80 rpm and loads of 250–1000 grams. At loads of 250 grams the wear lives are over 0.5 million cycles, but at 1000 gram loads, it decreases to 38,000 cycles. Friction experiments and tensile tests have indicated that sputtered films have a strong adherence to metal surfaces. Electron transmission, diffraction and scanning electron microscopy show that these films have an extremely small particle size, less than 30 Å in diameter, and are very dense and free from observable pinholes. The high kinetic energy of these sputtered species, the submicroscopic particle size and the sputter-etched substrate surface is responsible for strong adhesion and cohesion of the sputtered film.