Application of hillock etching of microdefects to the investigation of Czochralski silicon by transmission electron microscopy
- 16 August 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 48 (2), K105-K107
- https://doi.org/10.1002/pssa.2210480245
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Oxygen precipitation and the generation of dislocations in siliconPhilosophical Magazine, 1976
- Characterization of structural defects in annealed silicon containing oxygenJournal of Applied Physics, 1976