Electromagnetic microrelays: Concepts and fundamental characteristics
- 1 January 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 40 (1), 41-47
- https://doi.org/10.1016/0924-4247(94)85028-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Microactuators with moving magnets for linear, torsional or multiaxial motionSensors and Actuators A: Physical, 1992
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978