Sputtering of Au by 45-keV ions for different fluences
- 1 July 1976
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 29 (1), 14-17
- https://doi.org/10.1063/1.88877
Abstract
Measurements are presented of absolute sputtering coefficients S for polycrystalline Au bombarded by 45‐keV ions with Zion ranging from 2 to 79. Low‐fluence results taken with chemically etched Au surfaces represent the first complete set of S values taken under the nearly ideal sputtering conditions of vanishingly small ion fluence and undamaged target surface. The results confirm unambiguously the smooth monotonic increase in S with Zion as predicted by sputtering theory. High‐fluence results are also obtained which are representative of implanted‐target surface conditions. These results exhibit the periodic variation of S with Zion as seen in past sputtering investigations.Keywords
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