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Embedded micromechanical devices for the monolithic integration of MEMS and CMOS
Home
Publications
Embedded micromechanical devices for the monolithic integration of MEMS and CMOS
Embedded micromechanical devices for the monolithic integration of MEMS and CMOS
JS
J.H. Smith
J.H. Smith
SM
S. Montague
S. Montague
JS
J.J. Sniegowski
J.J. Sniegowski
PM
P.J. McWhorter
P.J. McWhorter
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1 July 1995
report
Published by
Office of Scientific and Technical Information (OSTI)
https://doi.org/10.2172/114489
Abstract
The U.S. Department of Energy's Office of Scientific and Technical Information
Keywords
ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
MICROELECTRONIC CIRCUITS
MANUFACTURING
ACCELEROMETERS
MOS TRANSISTORS
FABRICATION
ACTUATORS
SIZE
All Articles
Open Access
Cited by 28 articles