Angular distribution of Ag atoms sputtered with A 5 keV Ar+ ion beam
- 1 March 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 14 (3), 263-267
- https://doi.org/10.1016/0168-583x(86)90591-4
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Momentum and recoil-flux anisotropies in collision-cascades: Influence on sputtered particle angular distributionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984
- Sputtering of two alloy systems by polyatomic ions: AgAu and CuZnNuclear Instruments and Methods in Physics Research, 1983
- Self-ion sputtering yields for copper, nickel, and aluminumNuclear Instruments and Methods in Physics Research, 1982
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982
- Angular distribution of Si atoms sputtered by keV Ar+ ionsJournal of Applied Physics, 1980
- Angular distributions of sputtered Mo and Ag during He+ and Ar+ ion bombardmentJournal of Nuclear Materials, 1978
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Angular Distribution of Sputtered MaterialJournal of Applied Physics, 1960
- Bemerkung zur Theorie der KathodenzerstäubungThe European Physical Journal A, 1935