Silicon Tube Structures For A Fluid Density Sensor
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 540-543
- https://doi.org/10.1109/sensor.1995.717279
Abstract
The influence on sensor performance of the dimensions of the first resonant silicon tube structure for measuring liquid fluid density is tested with regard to density sensitivity, vibration mode, resonance frequency and Q- factor for four different double-loop designs. The structure consists of a planar double loop structure of single crystalline silicon fabricated using anisotropic silicon etching and silicon fusion bonding. Tube structures with wall thicknesses of 100 /spl mu/m and 50 /spl mu/m were examined. They had fluid density sensitivities of -230 ppm/(kgm/sup -3/) and -320 ppm/(kgm/sup -3/) respectively.Keywords
This publication has 3 references indexed in Scilit:
- Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Fluid density sensor based on resonance vibrationSensors and Actuators A: Physical, 1995
- Measuring Liquid Density with a Tuning-Fork TransducerIEEE Transactions on Instrumentation and Measurement, 1983