Prediction of Auger peak intensities from overlayer structures
- 1 August 1976
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 9 (8), 694-695
- https://doi.org/10.1088/0022-3735/9/8/027
Abstract
Several authors (Gallon 1969, Shelton 1974, Seah 1973, Tarng and Wehner 1973) have presented formulae for the intensities of peaks in Auger electron spectroscopy from overlayer structures. A method is presented which is particularly applicable to the retarding field analyser (RFA) for calculating the contribution to the total intensity from each layer. This method provides an easily calculable estimate of the probability of escape of Auger electrons from each layer.Keywords
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