Electrical Properties and Film Structures of (BaxSr1−x)TiO3 Thin Films by RF Sputtering
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Size Effects in Sputtered PZT Thin FilmsMRS Proceedings, 1990
- Size effect on the ferroelectric phase transition inultrafine particlesPhysical Review B, 1988
- RF Sputtered Strontium Titanate FilmsIBM Journal of Research and Development, 1969