Three-dimensional microfabrication using synchrotron radiation
- 1 June 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 303 (3), 523-531
- https://doi.org/10.1016/0168-9002(91)90289-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fabrication of Microstructures of Extreme Structural Heights by Reaction Injection MoldingInternational Polymer Processing, 1989
- Microfabrication of membranes with extreme porosity and uniform pore sizeJournal of Membrane Science, 1988
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986