Two-dimensional modeling of a microcell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source
- 15 June 2001
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 89 (12), 7756-7763
- https://doi.org/10.1063/1.1370360
Abstract
No abstract availableKeywords
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