Main Features of the Electron Kinetics in Collision Dominated Steady‐State rf Plasmas
- 1 January 1985
- journal article
- research article
- Published by Wiley in Annalen der Physik
- Vol. 497 (4-6), 537-558
- https://doi.org/10.1002/andp.19854970421
Abstract
No abstract availableKeywords
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