Atomic Layer Epitaxy Growth of TiN Thin Films from Til4 and NH 3

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1 August 1998

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 145 (8), 2914-2920
https://doi.org/10.1149/1.1838736

Abstract

No abstract available

Cited by 62 articles