Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
- 31 December 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 193-194, 361-370
- https://doi.org/10.1016/s0040-6090(05)80046-x
Abstract
No abstract availableKeywords
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