Development of a Low-Dielectric-Constant Polymer for the Fabrication of Integrated Circuit Interconnect
Top Cited Papers
- 1 December 2000
- journal article
- Published by Wiley in Advanced Materials
- Vol. 12 (23), 1769-1778
- https://doi.org/10.1002/1521-4095(200012)12:23<1769::aid-adma1769>3.0.co;2-5