Post-hydrogenation of evaporated a-Si
- 1 January 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 89 (1-2), 9-12
- https://doi.org/10.1016/s0022-3093(87)80316-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Properties of fluorinated glow-discharge amorphous siliconPhysical Review B, 1985
- Effect of hydrogenation on the conductivity of UHV-deposited amorphous siliconPhilosophical Magazine Part B, 1985
- Post-hydrogenation of CVD deposited a-Si filmsJournal of Non-Crystalline Solids, 1980
- Hydrogenation of evaporated amorphous silicon films by plasma treatmentApplied Physics Letters, 1978