Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
- 1 January 2004
- journal article
- Published by Springer Nature in Journal of Electroceramics
- Vol. 12 (1/2), 101-108
- https://doi.org/10.1023/b:jecr.0000034004.99355.8b