TiC and TiN coatings by reactive sputtering for fusion applications
- 1 October 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 108 (4), 395-400
- https://doi.org/10.1016/0040-6090(83)90120-7
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Titanium carbide coatings on molybdenum by means of reactive sputtering and electron beam techniquesJournal of Nuclear Materials, 1981
- The deposition rate of metallic thin films in the reactive sputtering processThin Solid Films, 1975