Growth interfaces of Si1−xGex/Si heterostructures studied by i n s i t u laser light scattering
- 1 July 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (4), 2048-2053
- https://doi.org/10.1116/1.585775