The first observation of reflection high-energy electron diffraction intensity oscillations during the growth and sublimation of CdTe

Abstract

We report here for the first time the observation of intensity oscillations in the features of the reflection high-energy electron diffraction pattern during the growth and sublimation of CdTe from a (100) surface. Our study shows that both processes follow predominantly a two-dimensional layer-by-layer mechanism for the CdTe compound. The use of these intensity oscillations allows accurate in situ rate measurements for CdTe growth and sublimation as a function of substrate temperature. Intensity oscillations during growth were observed in the temperature range 240–370 °C. The longest lasting and more intense oscillations were seen at about 320–330 °C. Intensity oscillations during sublimation were detected above 360 °C. The activation energy obtained for the sublimation of CdTe was 1.92 eV (44.3 kcal/mol).