Electrostatically driven overdense rf plasma source

Abstract

We describe a radio‐frequency plasma generator consisting of two collinear cylinders surrounding a magnetically confined plasma column, excited by up to 7 kW of power at 155 MHz. The source is capable of generating plasma densities of the order of m_i/m_e times the critical density n_c=m_eω²/4πe². The plasma density, the efficiencies of plasma heating, and the ion and electron heating associated with this generator are described in detail.