X-ray emission analysis in the electron microscope

Abstract

The technique by which sample-emitted X-rays are recorded in the electron microscope is assessed. Although the method is relatively insensitive for elements of low atomic number, its applicability in the field of s imultaneous structural and compositional investigations is discussed, together with a critical examination of the analytical precision possible. Various examples of its use are described, including some where structure and stoichiometry can be determined in crystals containing fewer than 10 ¹⁰ atoms.