Ion Beam Enhanced Adhesion of Thin Films
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- THE STOPPING AND RANGE OF IONS IN SOLIDSPublished by Elsevier ,1984
- Ion-beam-enhanced adhesion in the electronic stopping regionNuclear Instruments and Methods in Physics Research, 1982
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Ion-beam-induced silicide formationApplied Physics Letters, 1979
- Introduction rates and annealing of defects in ion-implanted SiO2 layers on SiJournal of Applied Physics, 1974