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High-performance synchrotron orbital radiation x-ray stepper
Home
Publications
High-performance synchrotron orbital radiation x-ray stepper
High-performance synchrotron orbital radiation x-ray stepper
KK
K. Koga
K. Koga
NN
N. Nomura
N. Nomura
JY
J. Yasui
J. Yasui
YT
Y. Terui
Y. Terui
HN
H. Nagano
H. Nagano
KF
K. Fujita
K. Fujita
SK
S. Kusumoto
S. Kusumoto
KN
K. Nakano
K. Nakano
SN
S. Nakatani
S. Nakatani
SM
S. Mizuguchi
S. Mizuguchi
SA
S. Aoki
S. Aoki
MY
M. Yamamoto
M. Yamamoto
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1 November 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 8
(6)
,
1633-1637
https://doi.org/10.1116/1.585130
Abstract
No abstract available
Cited by 10 articles