Profile and groove-depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4-H2O2-H2O system
- 1 January 1976
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 28 (1), 44-46
- https://doi.org/10.1063/1.88569
Abstract
No abstract availableKeywords
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