Measurements of stylus radii
- 30 November 1979
- Vol. 57 (1), 39-49
- https://doi.org/10.1016/0043-1648(79)90138-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- A Procedure for calibrating the magnification of an scanning electron microscope using NBS SRM 484Published by National Institute of Standards and Technology (NIST) ,1977
- Possibilities and limitations of the stylus method for thin film thickness measurementsThin Solid Films, 1974
- Use of the Talystep in investigating diffraction grating groove profilesJournal of Physics E: Scientific Instruments, 1973
- Stylus Tracer Resolution and Surface Damage as Determined by Scanning Electron MicroscopyJournal of Engineering for Industry, 1972
- An investigation of the shape and dimensions of some diamond styliJournal of Physics E: Scientific Instruments, 1970