Development of a micromachined hazardous gas sensor array
- 1 August 2003
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 93 (1-3), 92-99
- https://doi.org/10.1016/s0925-4005(03)00244-2
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Formulation and characterization of ZnO:Sb thick-film gas sensorsThin Solid Films, 1998
- Structure and gas-sensing characteristics of undoped tin oxide thin films fabricated by ion-assisted depositionSensors and Actuators B: Chemical, 1998
- Tin oxide-based methane gas sensor promoted by alumina-supported Pd catalystSensors and Actuators B: Chemical, 1997
- Copper Oxide-Loaded Tin Dioxide Thin Film for Detection of Dilute Hydrogen SulfideJapanese Journal of Applied Physics, 1995
- H2S response of WO3 thin-film sensors manufactured by silicon processing technologySensors and Actuators B: Chemical, 1994
- Detection of sub-ppm H2S concentrations by means of SnO2(Pt) thin films, grown by the RGTO techniqueSensors and Actuators B: Chemical, 1993
- Stability, sensitivity and selectivity of tungsten trioxide films for sensing applicationsSensors and Actuators B: Chemical, 1993
- New approaches for improving semiconductor gas sensorsSensors and Actuators B: Chemical, 1991
- The mechanism of operation of WO3-based H2S sensorsSensors and Actuators B: Chemical, 1990
- A STUDY OF THE STRUCTURE OF COLLOQUIAL JAPANESE FROM THE STANDPOINT OF DEVELOPMENTAL PSYCHOLOGY (I)The Japanese journal of psychology, 1962