Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH
- 1 October 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 25 (1-3), 9-13
- https://doi.org/10.1016/0924-4247(90)87002-z
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Compensation structures for convex corner micromachining in siliconSensors and Actuators A: Physical, 1990
- A novel silicon accelerometer with a surrounding mass structureSensors and Actuators A: Physical, 1990