Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
- 1 October 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 38 (2), L17-L19
- https://doi.org/10.1016/0040-6090(76)90214-5
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Ion-beam-deposited polycrystalline diamondlike filmsApplied Physics Letters, 1976
- The deposition of hard surface layers by hydrocarbon cracking in a glow dischargeThin Solid Films, 1976
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971