Ion-beam-deposited polycrystalline diamondlike films
- 15 July 1976
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 29 (2), 118-120
- https://doi.org/10.1063/1.88963
Abstract
X‐ray and electron beam diffraction analyses have been carried out on thin films deposited from a beam of carbon ions. Results show that the films consist of a polycrystalline background of cubic diamond with a particle size of 50–100 Å with single‐crystal regions up to 5 μm in diameter.Keywords
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