A radio frequency dielectric sputtering system with non-grounded electrodes
- 1 January 1968
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 1 (1), 32-34
- https://doi.org/10.1088/0022-3735/1/1/307
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A small scale ratio frequency sputtering apparatusThin Solid Films, 1967
- Dielectric Thin Films through rf SputteringJournal of Applied Physics, 1966
- Sputtering of Dielectrics by High-Frequency FieldsJournal of Applied Physics, 1962