Microwave discharges produced by surface waves in argon gas
- 14 February 1987
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 20 (2), 197-203
- https://doi.org/10.1088/0022-3727/20/2/008
Abstract
Reports on an experiment in argon discharges produced by surface waves at 2.45 GHz. A self-consistent description of these discharges at low pressure (p<10 Torr) is presented. Characteristics such as the electron density, the maintaining electric field (E), the collision frequency for momentum transfer v and the mean power required for maintaining the electron-ion pair theta are determined as functions of the product of the pressure and the plasma diameter. In particular scaling laws are verified for v and theta . It is concluded that experimental surface-wave discharges behave similarly to positive-column discharges.Keywords
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