Detection of low NO2 concentrations with low power micromachined tin oxide gas sensors
- 21 September 1999
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 58 (1-3), 325-329
- https://doi.org/10.1016/s0925-4005(99)00092-1
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Measurements of VOCs with a Semiconductor Electronic NoseJournal of the Electrochemical Society, 1998
- A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbonsSensors and Actuators B: Chemical, 1997
- Polysilicon integrated microsystems: technologies and applicationsSensors and Actuators A: Physical, 1996
- Gas identification using micro gas sensor array and neural-network pattern recognitionSensors and Actuators B: Chemical, 1996
- Monolithic thin-film metal-oxide gas-sensor arrays with application to monitoring of organic vaporsSensors and Actuators B: Chemical, 1995
- Tin oxide micro gas sensor for detecting CH3SHSensors and Actuators B: Chemical, 1995
- The effect of additives in tin oxide on the sensitivity and selectivity to NOx and COSensors and Actuators B: Chemical, 1995
- An integrated gas sensor on silicon substrate with sensitive SnOx layerSensors and Actuators B: Chemical, 1990
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990