The effects of hydrogen on the nitridation of silicon
- 1 April 1979
- journal article
- letter
- Published by Springer Nature in Journal of Materials Science
- Vol. 14 (4), 1007-1008
- https://doi.org/10.1007/bf00550738
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The combined effects of Fe and H2 on the kinetics of silicon nitridationJournal of Materials Science, 1978
- A mechanism for the nitridation of Fe-contaminated siliconJournal of Materials Science, 1978
- Factors affecting the formation of the ?- and ?-phases of silicon nitrideJournal of Materials Science, 1978
- STRUCTURAL ASPECTS OF SILICON NITRIDEPowder Metallurgy, 1961
- Passivity during the Oxidation of Silicon at Elevated TemperaturesJournal of Applied Physics, 1958