Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3
- 1 August 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 94 (3), 233-248
- https://doi.org/10.1016/0040-6090(82)90300-5
Abstract
No abstract availableKeywords
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