Thin-film regular-array structures with 10-100 nm repeat distance
- 16 November 2000
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 12 (1), 11-13
- https://doi.org/10.1088/0957-4484/12/1/303
Abstract
We show that regular arrays of pillars and helices, with repeat distance below 100 nm, can be grown by oblique deposition onto a patterned rotating substrate. The size limits for such structures are discussed.Keywords
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