A new correlation method for improvement in selectivity of bulk trap measurements from capacitance and voltage transients

Abstract

A new correlation method for improvement in the selectivity of bulk trap measurements from both capacitance and voltage transients is proposed. It relies on using, for deep‐level transient spectroscopy, one of the new weighting functions instead of a weighting function originally proposed by Lang. The proposed method is an extension of Lang’s DLTS method. Analytical expressions for correlation signals are derived. Finally, a comparative analysis of results obtained for the proposed method with those obtained for Lang’s method and the method utilizing an exponential weighting function is made.