Laser annealing of silicon
- 1 June 1982
- journal article
- Published by AIP Publishing in Physics Today
- Vol. 35 (6), 24-30
- https://doi.org/10.1063/1.2915125
Abstract
Silicon is one of the best understood of all materials because it lies at the heart of one of the central technologies of the twentieth century: integrated circuits. How much more can we learn about silicon and ways of handling it? Quite a lot, apparently, if the remarkable developments in laser annealing over the past five years are any indication.Keywords
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