Two-Dimensional Epitaxial Growth of SrTiO3 Films on Carbon-Free Clean Surface of Nb-Doped SrTiO3 Substrate by Laser Molecular Beam Epitaxy
- 1 November 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (11R), 3664-3666
- https://doi.org/10.1143/jjap.31.3664
Abstract
A carbon-free clean SrTiO3(100) surface was obtained by rinsing with acetone and ethanol and subsequent oxidation under O2 flushing of 1×10-6 Torr at 650°C. A unit cell layer-by-layer growth was achieved in the laser molecular beam epitaxy growth of insulative SrTiO3 thin films on conductive Nb-doped SrTiO3 substrates thus cleaned, as verified by the observation of persisting RHEED intensity oscillation.Keywords
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