Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge
- 1 March 2007
- journal article
- Published by AIP Publishing in Physics of Plasmas
- Vol. 14 (3)
- https://doi.org/10.1063/1.2717889
Abstract
No abstract availableKeywords
This publication has 22 references indexed in Scilit:
- Frequency coupling in dual frequency capacitively coupled radio-frequency plasmasApplied Physics Letters, 2006
- Simulation study of surfing acceleration in magnetized space plasmasNew Journal of Physics, 2005
- Prospects of Phase Resolved Optical Emission Spectroscopy as a Powerful Diagnostic Tool for RF‐DischargesContributions to Plasma Physics, 2004
- Spectroscopic measurements of phase-resolved electron energy distribution functions in RF-excited dischargesEurophysics Letters, 2004
- Asymptotic Theory of Nonlinear Landau Damping and Particle Trapping in Waves of Finite AmplitudePhysical Review Letters, 1998
- Long-Time Behavior of Nonlinear Landau DampingPhysical Review Letters, 1997
- Modeling ionization by helicon wavesPhysics of Plasmas, 1997
- Analytical solution for capacitive RF sheathIEEE Transactions on Plasma Science, 1988
- Electron-Stream Interaction with PlasmasPublished by MIT Press ,1964
- Exact Nonlinear Plasma OscillationsPhysical Review B, 1957