Stability enhancement in electron-beam-sustained excimer laser discharges
- 15 July 1979
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 35 (2), 142-144
- https://doi.org/10.1063/1.91052
Abstract
Techniques are described for prolonging the duration of stable e‐beam‐controlled excimer laser discharges, including: temporal tailoring of either the discharge voltage or the ionization source and kinetics modification by way of additives. Theoretical and experimental results are presented for KrF* laser discharges.Keywords
This publication has 4 references indexed in Scilit:
- Plasma processes in electron-beam controlled rare-gas halide lasersIEEE Journal of Quantum Electronics, 1978
- Rare gas fluoride lasersIEEE Journal of Quantum Electronics, 1978
- Instability onset in electron-beam-sustained KrF* laser dischargesApplied Physics Letters, 1978
- Attachment-dominated electron-beam-ionized dischargesApplied Physics Letters, 1976