Wafer Bonding for Soi
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- The tensile fracture of quartz crystalsJournal of Materials Science, 1976
- Double-Cantilever Cleavage Mode of Crack PropagationJournal of Applied Physics, 1964