Depth profiling of metal oxides using Raman spectroscopy with ion bombardment

Abstract
Raman spectroscopy has been combined with ion bombardment to obtain chemical compound identification as a function of depth in films containing Fe2O3. Experiments were performed using Fe2O3 single crystals, oxidized iron foil, and oxidized stainless steel. Low sensitivity to sputter induced chemical changes is a major advantage of the technique, allowing reliable chemical profiles to be obtained for these thin-film oxides.