Depth profiling of metal oxides using Raman spectroscopy with ion bombardment
- 15 March 1982
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 40 (6), 499-501
- https://doi.org/10.1063/1.93156
Abstract
Raman spectroscopy has been combined with ion bombardment to obtain chemical compound identification as a function of depth in films containing Fe2O3. Experiments were performed using Fe2O3 single crystals, oxidized iron foil, and oxidized stainless steel. Low sensitivity to sputter induced chemical changes is a major advantage of the technique, allowing reliable chemical profiles to be obtained for these thin-film oxides.Keywords
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