The deposition of thin films by the decomposition of tetra-ethoxy silane in a radio frequency glow discharge
- 1 December 1972
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 14 (1), 105-118
- https://doi.org/10.1016/0040-6090(72)90373-2
Abstract
No abstract availableKeywords
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