Two-dimensional fluid model simulation of bell jar top inductively coupled plasma
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 25 (1), 1-6
- https://doi.org/10.1109/27.557479
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Magnetic field distribution measurements in a low-pressure inductive dischargeJournal of Applied Physics, 1995
- Two-dimensional simulation of inductive plasma sources with self-consistent power depositionIEEE Transactions on Plasma Science, 1995
- Nonlocal electron kinetics in collisional gas discharge plasmasIEEE Transactions on Plasma Science, 1995
- Investigation of electron source and ion flux uniformity in high plasma density inductively coupled etching tools using two-dimensional modelingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Electron-density and energy distributions in a planar inductively coupled dischargeJournal of Applied Physics, 1994
- Plasma processingIEEE Transactions on Plasma Science, 1994
- Two-dimensional fluid model of high density inductively coupled plasma sourcesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Design of High-Density Plasma Sources for Materials ProcessingPublished by Elsevier ,1994
- Novel radio-frequency induction plasma processing techniquesJournal of Vacuum Science & Technology A, 1993
- Ion bombardment energy distributions in a radio frequency induction plasmaApplied Physics Letters, 1993