Optical properties of aluminum oxynitrides deposited by laser-assisted CVD
- 15 April 1986
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 25 (8), 1311-1318
- https://doi.org/10.1364/ao.25.001311
Abstract
Composition-dependent optical properties of (Al2O3)1−c−(AlN)c films deposited by the laser-assisted chemical vapor deposition (L-CVD) technique are investigated. Three distinct substrate temperature regions give rise to three distinct film compositions from A12O3, through oxynitride composites, and ultimately to A1N. Optical parameters of the films deposited on fused quartz substrates are deduced from spectrophotometric transmittance characteristics in the spectral region ranging from 0.18 to 3.5 μm. The optical energy gap of the films is determined from optical absorption spectra. Fourier transfer infrared spectra (4400–400 cm−1) are used to characterize the chemical composition of the films.This publication has 30 references indexed in Scilit:
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